Friday 30 Nov 2018Carbon Nanotubes Meet MEMS: Co-intergration Enables 9 Phyiscal and Chemical Sensors on a Single Chips IoT Node for Water Network Monitoring

Dr Berengere Lebental - IFSTTAR/Ecole Polytechnique/CNRS

Harrison 170 13:30-14:30


In the field of water quality monitoring, there is an increasing demand for compact, multiparameter water monitoring probes at low cost. EU H2020 project Proteus ( delivers a reconfigurable MEMS and nano-enabled sensor platform for cognitive water quality monitoring with predictive capabilities and in-built redundancy for increased lifespan. Energy autonomy is achieved by harvesting both water flow and solar energy. We demonstrate the massive heterointegration of carbon nanotube (CNT) sensors with MEMS sensors on a single monolithic 1cm (squared) silicon chip, enabling monitoring of 9 parameters (temperatue, pressure, flow rate, conductivity, pH, hardness, chlorine, chloride, nitrates) with up to 32 multiplexed sensing devices. Beyond the advances in heterointegration, we propose novel concepts for flow rate sensing on Silicon and nitrates, calcium, chlorine and chlorine sensing using polymer-functionalized CNT. The prototypes, assembled into a pre-industrial packaging, are tested in Sense-City model, 40m long, drink water loop, as well as in the field, and demonstrate capability for real-time detection of temperature, pH, chlorine and chloride changes in a quasi-real scenario.


Dr Berengere LEBENTAL (female) graduated from Ecole Polytechnique's (Paris Saclay University, France) Engineering Program in 2006 and two of its MSc Programs in Nanotechnology and Physics in 2007. She achieved her PhD in Civil Engineering from Universite Paris-Est, France, in 2010 (ENPC-PariTech PhD award in 2011). Since 2010, she is research scientist at Laboratory of Physics of Interfaces and Thin Films (Ecole Polytechnique, CNRS) and French Institute of Science and Technology for Transport, Development and Network (IFSTTAR).

A physicist specialized in nanoelectronics and sp2-carbon-based nanomaterials, her research work focuses on nano-enabled sensors for smart city applications, including design, fabrication, reliability analysis, IoT integration, field deployment and data exploitation.

She has coordinated several large scale national and EU research projects on sensors for smart cities, such as Sense-City or Proteus. Since 2017, she is cofounder of the startup Altaroad for connected roads and coordinator of the 2019-2022 EU-India LOTUS project.

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