JEOL JSM-5400LV Low Vacuum SEM
Details: Scanning electron microscopes (SEM) are essential tools for quality control, analytical testing, and materials development, employed widely from production lines to research and development laboratories. Applications include research and education, materials development in the fields of materials science, semiconductor, and biochemistry, product testing, evaluation, failure analysis, and quality control in the areas of electronics, machinery, automobile, construction, food, textile, and chemicals. SEM’s provide high resolution 3D imaging, qualitative and semi-quantitative chemical analysis.
The low vacuum SEM generates an electron beam allowing the examination of a sample. The instrument is equipped with an x-ray EDS (Energy Dispersive Spectrometer) detector and backscatter/secondary electron detectors that are used in combination to image and evaluate a sample. The secondary electron detector uses secondary electrons from a sample to produce an image of the sample surface. The backscatter detector uses backscattered electrons from a sample producing an image based on the average atomic number, showing compositional variations. The x-ray EDS detector allows the examination of x-rays from a sample for the purpose of qualitative and semi-quantitative chemical analysis.
CSM JSM-5400LV Specifications
Analysis type: Imaging and elemental analysis
Vacuum modes: Low vacuum: 10 to 140 Pa; High vacuum: 7x10 -4 Pa
Accelerating voltage: 0.5 to 30keV
Electron Gun: Tungsten filament
Imaging Modes: SEI, BEI
Resolution: Low vacuum: 15 nm; High vacuum: 3.5 nm
Analytical Functions: Oxford ISIS EDS system
Detectable elements: 6C to 92U
Specimen stage: Eucentric goniometer X=80mm, Y=40mm, Z=5 to 48mm, T=-10 to 90, R=360
The low vacuum facility allows objects to be placed into the chamber with little or no preparation. High vacuum mode generally requires a sample to be carbon coated . Samples that can be examined include rock fragments, powders or soils mounted in resin blocks or on a stub, polished thin-sections, smear mounts, filter papers or any organic or inorganic material that is stable under vacuum.